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A Thin Film Metallization Process Development for Silicon Nitride Ceramic Substrates in Power Electronics Packaging
Xin Chen, Donglin Zhang, Jiaqi Song, Tao Xu, Xin Tian, Xiuchen Zhao, Yongjun Huo*
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review