Research output per year
Research output per year
Search results
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2025
Automatic Detection Technology and Application of High-Performance Stokes-Mueller Imaging Polarimeter
Hu, Y. J., Ma, X., Zheng, M., Liu, L. H. & Li, Y. Q., 2025, International Conference Optoelectronic Information and Optical Engineering, OIOE 2024. Yue, Y. & Leng, L. (eds.). SPIE, 135130P. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13513).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Design of a high transmission illumination optics for anamorphic EUV lithography optics using deep reinforcement learning
Li, T., Chen, Y., Li, Y. & Liu, L., 27 Jan 2025, In: Optics Express. 33, 2, p. 2261-2276 16 p.Research output: Contribution to journal › Article › peer-review
Open Access -
Fast source mask optimization adopting mask prediction and feedback method with similarity penalty
Huang, W., Li, Y., Yuan, M., Li, Z., Yang, H. & Li, Z., 1 Jan 2025, In: Applied Optics. 64, 1, p. 40-49 10 p.Research output: Contribution to journal › Article › peer-review
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Quantitative design for compensator in aspheric non-null interferometry with extended measurement range
Wang, T., Han, X., Li, Y. & Liu, K., Mar 2025, In: Optics Communications. 577, 131446.Research output: Contribution to journal › Article › peer-review
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Source optimization method employing dynamic polarization aberration model for high-NA EUVL
Li, Z., Yuan, M., Li, Z., Yang, H., Huang, W. & Li, Y., 1 Feb 2025, In: Applied Optics. 64, 4, p. 728-734 7 p.Research output: Contribution to journal › Article › peer-review
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2024
Catadioptric omnidirectional thermal odometry in dynamic environment
Wu, Y., Wang, L., Zhang, L., Han, X., Zheng, D., Wang, S., Li, Y. & Cai, Y., Oct 2024, In: ISPRS Journal of Photogrammetry and Remote Sensing. 216, p. 45-65 21 p.Research output: Contribution to journal › Article › peer-review
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Effective cervical intraepithelial neoplasia classification through polarization-based machine learning
Ren, J., Li, Y., Liu, K., Li, Y., Liu, A. & Ma, Z., 1 Oct 2024, In: Applied Optics. 63, 28, p. 7499-7509 11 p.Research output: Contribution to journal › Article › peer-review
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Enabling source and mask optimization by a dynamic aberration imaging model across the full exposure field
Li, Z., Yuan, M., Yang, H., Li, Z., Chen, Y. & Li, Y., 2024, Eighth International Workshop on Advanced Patterning Solutions, IWAPS 2024. Wei, Y. & Ye, T. (eds.). SPIE, 134230U. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13423).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Fast and direct calibration for high numerical aperture quadriwave lateral shearing interferometry using geometry model with higher-order Taylor expansion
Han, X., Wang, T., Zhang, X., Zhong, H., Liu, S., Li, Y. & Liu, K., 10 Aug 2024, In: Applied Optics. 63, 23, p. 6073-6085 13 p.Research output: Contribution to journal › Article › peer-review
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Fast and high-fidelity EUV curvilinear mask optimization by distance-versus-angle signature
Huang, W., Li, Y., Yang, H., Yuan, M., Zhang, Z., Li, Z. & Li, Z., 15 Jul 2024, In: Optics Express. 32, 15, p. 26292-26305 14 p.Research output: Contribution to journal › Article › peer-review
Open Access1 Citation (Scopus) -
Fast and Highly Accurate Zonal Wavefront Reconstruction from Multi-Directional Slope and Curvature Information Using Subregion Cancelation
Liu, S., Zhong, H., Li, Y. & Liu, K., Apr 2024, In: Applied Sciences (Switzerland). 14, 8, 3476.Research output: Contribution to journal › Article › peer-review
Open Access2 Citations (Scopus) -
Fast lithographic source optimization adopting a certain interval contour sampling compressive sensing
Li, Z., Li, Y., Yang, H., Yuan, M., Zhang, Z., Huang, W. & Li, Z. X., 20 Dec 2024, In: Applied Optics. 63, 36, p. 9103-9109 7 p.Research output: Contribution to journal › Article › peer-review
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Fast lithographic source optimization adopting RMSProp with iterative shrinkage-thresholding algorithm compressive sensing for high fidelity patterning
Li, Z., Yang, H., Yuan, M., Li, Z., Chen, Y. & Li, Y., 2024, Eighth International Workshop on Advanced Patterning Solutions, IWAPS 2024. Wei, Y. & Ye, T. (eds.). SPIE, 134230H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13423).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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High efficiency regulation method to generate an illumination source by adopting the micromirror array in DUV lithography
Chen, Y., Li, Y. & Liu, L., 10 Oct 2024, In: Applied Optics. 63, 29, p. 7608-7614 7 p.Research output: Contribution to journal › Article › peer-review
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High-fidelity source mask optimization for suppressing line-end shortening
Zhang, Z., Yuan, M., Li, Z., Huang, W., Yang, H., Li, Z. & Li, Y., 10 Jan 2024, In: Applied Optics. 63, 2, p. 327-337 11 p.Research output: Contribution to journal › Article › peer-review
1 Citation (Scopus) -
In situ calibration of shear ratio for quadriwave lateral shearing interferometry using double-slit interference
Zhang, X., Han, X., Wang, T., Zhong, H., Liu, S., Li, Y. & Liu, K., 20 Feb 2024, In: Applied Optics. 63, 9, p. 2331-2339 9 p.Research output: Contribution to journal › Article › peer-review
2 Citations (Scopus) -
Phase microscopy using the quadriwave lateral shearing interferometer with continuously variable shear ratio
Zhong, H., Li, Y., Liu, K., Zhang, X., Han, X. & Wang, T., 2024, AOPC 2024: Computational Imaging Technology. Su, P. (ed.). SPIE, 135010E. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13501).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Physical model-based ArF photoresist formulation development
Yue, L., Mao, Z., Wu, Q., Li, Y. & Li, Y., 1 Feb 2024, In: AIP Advances. 14, 2, 025343.Research output: Contribution to journal › Article › peer-review
Open Access2 Citations (Scopus) -
Quantitative analysis of the contrast modulation for multilateral shearing interferometers
Zhong, H., Li, Y., Liu, K., Zhang, X., Han, X. & Wang, T., 26 Aug 2024, In: Optics Express. 32, 18, p. 32421-32434 14 p.Research output: Contribution to journal › Article › peer-review
Open Access -
Reducing noise in polarization-sensitive optical coherence tomography for high-quality local phase retardation imaging
Chen, G., Wang, W. & Li, Y., 10 Apr 2024, In: Applied Optics. 63, 11, p. 2822-2830 9 p.Research output: Contribution to journal › Article › peer-review
1 Citation (Scopus) -
Zernike polynomial based pupil wavefront optimization technology for extreme ultraviolet lithography
Yuan, M., Li, Z., Yang, H., Li, Z., Chen, Y. & Li, Y., 2024, Eighth International Workshop on Advanced Patterning Solutions, IWAPS 2024. Wei, Y. & Ye, T. (eds.). SPIE, 134231K. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13423).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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波 片 快 轴 角 对 空 间 调 制 偏 振 测 量 精 度 的 影 响
Translated title of the contribution: Influence of Fast Axis Angle of Wave Plate on Accuracy of Spatially Modulated Polarization MeasurementsZhang, X., Ning, T., Liu, L. & Li, Y., Aug 2024, In: Guangxue Xuebao/Acta Optica Sinica. 44, 16, 1612003.Research output: Contribution to journal › Article › peer-review
1 Citation (Scopus) -
2023
Complex Correlated Phase Gradient Variance Based Optical Coherence Tomography Angiography
Chen, G., Wang, W. & Li, Y., 1 Feb 2023, In: IEEE Photonics Journal. 15, 1, 3900209.Research output: Contribution to journal › Article › peer-review
Open Access1 Citation (Scopus) -
Derivation and calibration of spectral response for a channeled spectropolarimeter
Zhao, Z., Li, Y., Liu, K. & Zhou, G., 31 Jul 2023, In: Optics Express. 31, 16, p. 25763-25780 18 p.Research output: Contribution to journal › Article › peer-review
Open Access5 Citations (Scopus) -
Design of A Large Field of View High Numerical Aperture Extreme Ultraviolet Lithography Illumination System
Zhang, X., Chen, Y., Nan, Y. & Li, Y., 2023, IWAPS 2023 - 2023 7th International Workshop on Advanced Patterning Solutions. Wei, Y. & Ye, T. (eds.). Institute of Electrical and Electronics Engineers Inc., (IWAPS 2023 - 2023 7th International Workshop on Advanced Patterning Solutions).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Distinguishing Malignant Melanoma and Benign Nevus of Human Skin by Retardance Using Mueller Matrix Imaging Polarimeter
Wang, W., Chen, G. & Li, Y., Jun 2023, In: Applied Sciences (Switzerland). 13, 11, 6514.Research output: Contribution to journal › Article › peer-review
Open Access4 Citations (Scopus) -
Effective multi-objective inverse lithography technology at full-field and full-chip levels with a hybrid dynamic priority algorithm
Wei, P., Li, Y., Li, Z., Yuan, M., Li, Z., Wang, C. C., Li, A., Qiao, L. & Yang, H., 5 Jun 2023, In: Optics Express. 31, 12, p. 19215-19235 21 p.Research output: Contribution to journal › Article › peer-review
Open Access2 Citations (Scopus) -
Efficient acquisition of Mueller matrix via spatially modulated polarimetry at low light field
Ning, T., Ma, X., Li, Y., Li, Y. & Liu, K., 24 Apr 2023, In: Optics Express. 31, 9, p. 14532-14559 28 p.Research output: Contribution to journal › Article › peer-review
Open Access6 Citations (Scopus) -
High-accuracy reconstruction of Stokes vectors via spatially modulated polarimetry using deep learning at low light field
Zhang, X., Liu, L., Li, Y., Ning, T. & Zhao, Z., Dec 2023, In: Applied Optics. 62, 34, p. 9009-9017 9 p.Research output: Contribution to journal › Article › peer-review
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Implicit function characterization of the curvilinear mask to realize parametric optical proximity correction with a neighborhood parallel tabu search
Wei, P., Li, Y., Li, Z., Yuan, M. & Yang, H., Jun 2023, In: Applied Optics. 62, 18, p. 4848-4859 12 p.Research output: Contribution to journal › Article › peer-review
4 Citations (Scopus) -
Improving autonomous detection in dynamic environments with robust monocular thermal SLAM system
Wu, Y., Wang, L., Zhang, L., Bai, Y., Cai, Y., Wang, S. & Li, Y., Sept 2023, In: ISPRS Journal of Photogrammetry and Remote Sensing. 203, p. 265-284 20 p.Research output: Contribution to journal › Article › peer-review
12 Citations (Scopus) -
Light propagation equation for a double Stokes-Mueller polarimetry
Wu, J., Li, Y., Lai, C. & Liu, J., 2023, AOPC 2022: Advanced Laser Technology and Applications. Bai, Z., Chen, Q. & Tan, Y. (eds.). SPIE, 125541D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12554).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Mueller matrix imaging polarimeter at the wavelength of 265 nm
Li, Y., Li, Y., Liu, K., Zhou, G., Liu, L., Liu, A. & Ma, Z., 10 Apr 2023, In: Applied Optics. 62, 11, p. 2945-2951 7 p.Research output: Contribution to journal › Article › peer-review
2 Citations (Scopus) -
The optimal measurement matrix with minimal condition number for Double Stokes-Mueller polarimetry
Lai, C., Li, Y., Wu, J. & Liu, J., 2023, AOPC 2022: Biomedical Optics. Qu, J., Fu, L. & Yao, C. (eds.). SPIE, 125600B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12560).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Vascular imaging of in vivo human skin using a fiber-based PS-OCT system
Chen, G., Ding, J., Wang, W. & Li, Y., 2023, Fourteenth International Conference on Information Optics and Photonics, CIOP 2023. Yang, Y. (ed.). SPIE, 129350L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12935).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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四 波 前 横 向 剪 切 干 涉 仪 的 关 键 技 术 研 究
Translated title of the contribution: Key Technologies of Quadri-Wave Lateral Shearing InterferometerLiu, K., Zhang, X., Zhong, H., He, F., Liu, S. & Li, Y., Aug 2023, In: Guangxue Xuebao/Acta Optica Sinica. 43, 15, 1512001.Research output: Contribution to journal › Review article › peer-review
Open Access8 Citations (Scopus) -
嵌入式相位传感的多功能 Stokes-Mueller 偏振仪
Translated title of the contribution: Multifunctional Stokes-Mueller Polarimeter Based on Embedded Phase SensingZhong, H., Li, Y., Liu, K., Wang, J., Li, Y. & Wu, J., Jan 2023, In: Guangxue Xuebao/Acta Optica Sinica. 43, 2, 0212003.Research output: Contribution to journal › Article › peer-review
Open Access4 Citations (Scopus) -
极 紫 外 光 刻 机 曝 光 系 统 光 学 设 计 研 究 与 进 展
Translated title of the contribution: Research and Progress on Optical Design of Exposure Systems in Extreme Ultraviolet LithographyLi, Y., Nan, Y., Chen, Y., Yan, X., Zhang, X. & Liu, L., Aug 2023, In: Guangxue Xuebao/Acta Optica Sinica. 43, 15, 1522002.Research output: Contribution to journal › Article › peer-review
Open Access3 Citations (Scopus) -
2022
Breast cancer classification from histopathological images using Transformers
Wen, Y. & Yanqiu, L., 2022, Thirteenth International Conference on Information Optics and Photonics, CIOP 2022. Yang, Y. (ed.). SPIE, 1247828. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12478).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Comparative study of OCTA algorithms with a high-sensitivity multi-contrast Jones matrix OCT system for human skin imaging
Chen, G., Wang, W. & Li, Y., 1 Sept 2022, In: Biomedical Optics Express. 13, 9, p. 4718-4736 19 p.Research output: Contribution to journal › Article › peer-review
Open Access4 Citations (Scopus) -
Design of an extreme ultraviolet lithography projection objective with a grouping design method through forward and reverse real ray tracing
Yan, X., Li, Y., Li, Y., Liu, L. & Liu, K., 1 Sept 2022, In: Applied Optics. 61, 25, p. 7449-7454 6 p.Research output: Contribution to journal › Article › peer-review
7 Citations (Scopus) -
Design of an objective for a hyper-numericalaperture immersion lithography tool with a multi-step alternative grouping design method
Yan, X., Li, Y., Liu, L. & Liu, K., 1 Jun 2022, In: Applied Optics. 61, 16, p. 4743-4751 9 p.Research output: Contribution to journal › Article › peer-review
3 Citations (Scopus) -
Erratum: High-fidelity and rapid cellular-level Mueller matrix imaging for tissue identification with unstained sections (Biomed. Opt. Express (2021) 12 (4745) DOI: 10.1364/BOE.427614)
Wang, J., Li, Y., Cao, C., Zhou, G. & Li, L., 1 Feb 2022, In: Biomedical Optics Express. 13, 2, p. 709 1 p.Research output: Contribution to journal › Comment/debate
Open Access -
Error analysis of rapid Stokes polarimetric imaging with circularly polarized illumination
Long, C., Li, Y., Wu, J. & Zhou, G., 2022, Thirteenth International Conference on Information Optics and Photonics, CIOP 2022. Yang, Y. (ed.). SPIE, 1247831. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12478).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Full Field Adaptive Tolerance Analysis of Extreme Ultraviolet Lithography Objective
Ma, Y., Zhong, X., Yan, X., Liu, L. & Li, Y., 2022, IWAPS 2022 - 2022 6th International Workshop on Advanced Patterning Solutions. Wei, Y. & Ye, T. (eds.). Institute of Electrical and Electronics Engineers Inc., (IWAPS 2022 - 2022 6th International Workshop on Advanced Patterning Solutions).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1 Citation (Scopus) -
Grouping design method dependence on an illumination system and large off-axis distance for an anamorphic extreme ultraviolet lithography objective
Yan, X., Li, Y., Liu, L. & Liu, K., 20 Jan 2022, In: Applied Optics. 61, 3, p. 806-811 6 p.Research output: Contribution to journal › Article › peer-review
5 Citations (Scopus) -
High efficiency graded multilayer coating design using least-square fitting for NA0.55 extreme ultraviolet lithography Objective
Zhong, X., Ma, Y., Yan, X., Liu, K. & Li, Y., 2022, IWAPS 2022 - 2022 6th International Workshop on Advanced Patterning Solutions. Wei, Y. & Ye, T. (eds.). Institute of Electrical and Electronics Engineers Inc., (IWAPS 2022 - 2022 6th International Workshop on Advanced Patterning Solutions).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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High noise-resistant slope and curvature signal extraction algorithm in frequency domain for the Shack-Hartmann wavefront sensor
He, F., Liu, K., Li, Y., Qin, P., Zhong, H. & Zhang, X., 2022, Thirteenth International Conference on Information Optics and Photonics, CIOP 2022. Yang, Y. (ed.). SPIE, 124783L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12478).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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Holistic and efficient calibration method for Mueller matrix imaging polarimeter with a high numerical aperture
Li, Y., Li, Y., Zhou, G., Yan, X., Ning, T., Liu, K., Liu, L., Liu, A. & Ma, Z., 20 Nov 2022, In: Applied Optics. 61, 33, p. 9937-9945 9 p.Research output: Contribution to journal › Article › peer-review
7 Citations (Scopus) -
Hybrid wavefront reconstruction from multi-directional slope and full curvature measurements using integral equations with higher-order truncation errors for wavefront sensors
Zhong, H., Li, Y., Qin, P., He, F. & Liu, K., Jul 2022, In: Optics and Lasers in Engineering. 154, 106991.Research output: Contribution to journal › Article › peer-review
6 Citations (Scopus)
