Quantitative design for compensator in aspheric non-null interferometry with extended measurement range

Tao Wang, Xiting Han, Yanqiu Li, Ke Liu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, a quantitative design method for extending the measurement range of compensator in aspheric non-null interferometry is proposed by quantifying the demodulation limit of the interferometer in terms of Seidel aberration. Besides, this method can quickly estimate the measurable aspherical parameter range of the compensator without the vast number of simulations using optical design software. Moreover, many new structures of non-null compensator can be derived with this method. The correctness of the proposed method is proved by applying the method to the variable spherical aberration compensator of spherical lens type. In addition, a double movable lenses compensator (DMLC) is proposed according to the method. The DMLC offers the advantage of flexible aspherical compensation range in accordance with diverse measurement requirement. Experimental testing of aspheric surface with the DMLC has been implemented. The experimental results, which are consistent with the simulation results, have proved the extended measurement range of DMLC.

Original languageEnglish
Article number131446
JournalOptics Communications
Volume577
DOIs
Publication statusPublished - Mar 2025

Keywords

  • Aspheric surface
  • Measurement range
  • Non-null compensator
  • Quantitative design

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Wang, T., Han, X., Li, Y., & Liu, K. (2025). Quantitative design for compensator in aspheric non-null interferometry with extended measurement range. Optics Communications, 577, Article 131446. https://doi.org/10.1016/j.optcom.2024.131446