Abstract
In this paper, a quantitative design method for extending the measurement range of compensator in aspheric non-null interferometry is proposed by quantifying the demodulation limit of the interferometer in terms of Seidel aberration. Besides, this method can quickly estimate the measurable aspherical parameter range of the compensator without the vast number of simulations using optical design software. Moreover, many new structures of non-null compensator can be derived with this method. The correctness of the proposed method is proved by applying the method to the variable spherical aberration compensator of spherical lens type. In addition, a double movable lenses compensator (DMLC) is proposed according to the method. The DMLC offers the advantage of flexible aspherical compensation range in accordance with diverse measurement requirement. Experimental testing of aspheric surface with the DMLC has been implemented. The experimental results, which are consistent with the simulation results, have proved the extended measurement range of DMLC.
Original language | English |
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Article number | 131446 |
Journal | Optics Communications |
Volume | 577 |
DOIs | |
Publication status | Published - Mar 2025 |
Keywords
- Aspheric surface
- Measurement range
- Non-null compensator
- Quantitative design