Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion Sensor

Huahuang Luo*, Xiaoyi Wang, Mingzheng Duan, Jose Cabot, Yi Kuen Lee*

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

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Engineering

Chemical Engineering