Jiao, R., Yang, G., Wang, R., Tang, Y., Liu, Z., Xie, H., Yu, H. & Wang, X., 2023, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023.Institute of Electrical and Electronics Engineers Inc., 页码 752-7554 页码 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2023-January).