Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion Sensor

Huahuang Luo*, Xiaoyi Wang, Mingzheng Duan, Jose Cabot, Yi Kuen Lee*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

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Chemical Engineering