摘要
The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | Optical Metrology and Inspection for Industrial Applications VII |
| 编辑 | Sen Han, Gerd Ehret, Benyong Chen |
| 出版商 | SPIE |
| ISBN（电子版） | 9781510639195 |
| DOI | |
| 出版状态 | 已出版 - 2020 |
| 活动 | Optical Metrology and Inspection for Industrial Applications VII 2020 - Virtual, Online, 中国 期限: 11 10月 2020 → 16 10月 2020 |
出版系列
| 姓名 | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| 卷 | 11552 |
| ISSN（印刷版） | 0277-786X |
| ISSN（电子版） | 1996-756X |
会议
| 会议 | Optical Metrology and Inspection for Industrial Applications VII 2020 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Virtual, Online |
| 时期 | 11/10/20 → 16/10/20 |
指纹
探究 'Methods improve micro multiple configurations' 的科研主题。它们共同构成独一无二的指纹。引用此
Liu, H., Li, M., Zhu, R., & Zhou, L. (2020). Methods improve micro multiple configurations. 在 S. Han, G. Ehret, & B. Chen (编辑), Optical Metrology and Inspection for Industrial Applications VII 文章 115521B (Proceedings of SPIE - The International Society for Optical Engineering; 卷 11552). SPIE. https://doi.org/10.1117/12.2573652