Methods improve micro multiple configurations

Hua Liu*, Mingsuo Li, Ronggang Zhu, Liwei Zhou

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.

Original languageEnglish
Title of host publicationOptical Metrology and Inspection for Industrial Applications VII
EditorsSen Han, Gerd Ehret, Benyong Chen
PublisherSPIE
ISBN (Electronic)9781510639195
DOIs
Publication statusPublished - 2020
EventOptical Metrology and Inspection for Industrial Applications VII 2020 - Virtual, Online, China
Duration: 11 Oct 202016 Oct 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11552
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Metrology and Inspection for Industrial Applications VII 2020
Country/TerritoryChina
CityVirtual, Online
Period11/10/2016/10/20

Keywords

  • Resolution
  • Sensor System
  • System Engineering

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