Methods improve micro multiple configurations

Hua Liu; Mingsuo Li; Ronggang Zhu; Liwei Zhou

doi:10.1117/12.2573652

Methods improve micro multiple configurations

Hua Liu^*, Mingsuo Li, Ronggang Zhu, Liwei Zhou

^*Corresponding author for this work

School of Computer Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.

Original language	English
Title of host publication	Optical Metrology and Inspection for Industrial Applications VII
Editors	Sen Han, Gerd Ehret, Benyong Chen
Publisher	SPIE
ISBN (Electronic)	9781510639195
DOIs	https://doi.org/10.1117/12.2573652
Publication status	Published - 2020
Event	Optical Metrology and Inspection for Industrial Applications VII 2020 - Virtual, Online, China Duration: 11 Oct 2020 → 16 Oct 2020

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11552
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Optical Metrology and Inspection for Industrial Applications VII 2020
Country/Territory	China
City	Virtual, Online
Period	11/10/20 → 16/10/20

Keywords

Resolution
Sensor System
System Engineering

Access to Document

10.1117/12.2573652

Cite this

Liu, H., Li, M., Zhu, R., & Zhou, L. (2020). Methods improve micro multiple configurations. In S. Han, G. Ehret, & B. Chen (Eds.), Optical Metrology and Inspection for Industrial Applications VII Article 115521B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11552). SPIE. https://doi.org/10.1117/12.2573652

@inproceedings{d0f21401b35449a8a6d158ef8943778f,

title = "Methods improve micro multiple configurations",

abstract = "The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.",

keywords = "Resolution, Sensor System, System Engineering",

author = "Hua Liu and Mingsuo Li and Ronggang Zhu and Liwei Zhou",

note = "Publisher Copyright: {\textcopyright} 2020 SPIE.; Optical Metrology and Inspection for Industrial Applications VII 2020 ; Conference date: 11-10-2020 Through 16-10-2020",

year = "2020",

doi = "10.1117/12.2573652",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Sen Han and Gerd Ehret and Benyong Chen",

booktitle = "Optical Metrology and Inspection for Industrial Applications VII",

address = "United States",

}

Liu, H, Li, M, Zhu, R & Zhou, L 2020, Methods improve micro multiple configurations. in S Han, G Ehret & B Chen (eds), Optical Metrology and Inspection for Industrial Applications VII., 115521B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11552, SPIE, Optical Metrology and Inspection for Industrial Applications VII 2020, Virtual, Online, China, 11/10/20. https://doi.org/10.1117/12.2573652

Methods improve micro multiple configurations. / Liu, Hua; Li, Mingsuo; Zhu, Ronggang et al.
Optical Metrology and Inspection for Industrial Applications VII. ed. / Sen Han; Gerd Ehret; Benyong Chen. SPIE, 2020. 115521B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11552).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Methods improve micro multiple configurations

AU - Liu, Hua

AU - Li, Mingsuo

AU - Zhu, Ronggang

AU - Zhou, Liwei

PY - 2020

Y1 - 2020

N2 - The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.

AB - The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.

KW - Resolution

KW - Sensor System

KW - System Engineering

UR - http://www.scopus.com/inward/record.url?scp=85097238635&partnerID=8YFLogxK

U2 - 10.1117/12.2573652

DO - 10.1117/12.2573652

M3 - Conference contribution

AN - SCOPUS:85097238635

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Metrology and Inspection for Industrial Applications VII

A2 - Han, Sen

A2 - Ehret, Gerd

A2 - Chen, Benyong

PB - SPIE

T2 - Optical Metrology and Inspection for Industrial Applications VII 2020

Y2 - 11 October 2020 through 16 October 2020

ER -

Methods improve micro multiple configurations

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Keywords

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