Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Material Science

• Silicon 100%
• Amorphous Material 50%
• Crystalline Material 50%
• Nanoelectronics 50%
• Periodic Structure 50%
• Surface Structure 50%
• Multiphoton Lithography 50%
• Laser Material 50%

Engineering

• Laser Modification 100%
• Induced Periodic Surface Structure 25%
• Periodic Surface Structure 25%