Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Ji Huang, Lan Jiang*, Xiaowei Li, Andong Wang, Zhi Wang, Qingsong Wang, Jie Hu, Liangti Qu, Tianhong Cui, Yongfeng Lu

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

63 Citations (Scopus)

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