A Photosensitive Polyimide-SiO2Bimorph based Electrothermal Micromirror with High Impact Resistance

Hengzhang Yang, Anrun Ren, Yingtao Ding*, Yao Lu, Teng Pan, Xiaoyi Wang, Huikai Xie*

*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

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