A Photosensitive Polyimide-SiO₂Bimorph based Electrothermal Micromirror with High Impact Resistance

Hengzhang Yang, Anrun Ren, Yingtao Ding^*, Yao Lu, Teng Pan, Xiaoyi Wang, Huikai Xie^*

^*Corresponding author for this work

School of Integrated Circuits and Electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Engineering