Ren, A., Ding, Y., Yang, H., Pan, T., Zhang, Z. & Xie, H., 2024, IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024.Institute of Electrical and Electronics Engineers Inc., 页码 170-1734 页码 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
Yang, H., Ren, A., Ding, Y., Lu, Y., Pan, T., Wang, X. & Xie, H., 2024, IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024.Institute of Electrical and Electronics Engineers Inc., 页码 729-7324 页码 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).