@inproceedings{a60f8c9136574bbf9495ce29c71579a6,
title = "An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors",
abstract = "A novel electrothermal micromirror array integrated with thermal convection-based mirror position sensors is proposed, in which a heater is integrated on the mirror plate to generate a temperature distribution that will be changed by the movement of the mirror plate. The temperature change is then picked up by the thermistors integrated on the substrate. Both the displacement and the tip-tilt angle can be detected. A 3×3 micromirror array has been successfully fabricated. Experiments show an average sensitivity value of 8.6 mV/μm in the displacement range of 50 μm to 150 μm, and an average sensitivity of 95.5 mV/° in the angular scan range of 2° to 10°.",
keywords = "Thermal convection, micromirror array, mirror plate position sensor",
author = "Anrun Ren and Yingtao Ding and Hengzhang Yang and Teng Pan and Ziyue Zhang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",
year = "2024",
doi = "10.1109/MEMS58180.2024.10439487",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "170--173",
booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",
address = "United States",
}