Vectorial pupil optimization to compensate polarization distortion in immersion lithography system

Tie Li, Yang Liu, Yiyu Sun, Xu Yan, Pengzhi Wei, Yanqiu Li*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Vectorial pupil optimization to compensate polarization distortion in immersion lithography system'. Together they form a unique fingerprint.

Material Science

Engineering