Surface enhanced Raman scattering on ion-beam-deposited TiNx/Si substrates

Shujun Zhao; Yue Zhao; Yujing Ran; Huiping Lu; Qian Guo; Chang Gao; Yanfeng Zhao; Wenjie Yan; Zhaotan Jiang; Hanchun Wu; Duan Zhang; Zhi Wang

doi:10.1016/j.nimb.2020.03.008

Surface enhanced Raman scattering on ion-beam-deposited TiN_x/Si substrates

Shujun Zhao, Yue Zhao, Yujing Ran, Huiping Lu, Qian Guo, Chang Gao, Yanfeng Zhao, Wenjie Yan, Zhaotan Jiang, Hanchun Wu, Duan Zhang, Zhi Wang^*

^*Corresponding author for this work

School of Physics

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

Titanium nitride (TiN_x) thin films were fabricated on silicon substrates by ion beam deposition. The surface enhanced Raman scattering (SERS) effect of the TiN_x/Si substrates was studied with Rhodamine 6G as probe molecule. The results show that TiN_x thin films can enhance the Raman signal, and the film with suitable thickness can significantly improve the SERS performance. For the 30 nm thick TiN_x thin films the enhancement factor is up to 6.6×10⁴. The enhancement factor can be further improved several times by assisting ions. The main role of the assisting ions is to enhance the intensity and density of hot spots through the modification of surface morphology and plasmons. The study implies that high carrier concentration, and suitable size and high density of the grains and gaps are important for improving SERS performance. This work indicates the promising future of TiN_x and assisting ions in the development of SERS active templates.

Original language	English
Pages (from-to)	24-31
Number of pages	8
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	472
DOIs	https://doi.org/10.1016/j.nimb.2020.03.008
Publication status	Published - 1 Jun 2020

Keywords

Assisting ions
Localized field
Surface enhanced Raman scattering
Titanium nitride

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10.1016/j.nimb.2020.03.008

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title = "Surface enhanced Raman scattering on ion-beam-deposited TiNx/Si substrates",

abstract = "Titanium nitride (TiNx) thin films were fabricated on silicon substrates by ion beam deposition. The surface enhanced Raman scattering (SERS) effect of the TiNx/Si substrates was studied with Rhodamine 6G as probe molecule. The results show that TiNx thin films can enhance the Raman signal, and the film with suitable thickness can significantly improve the SERS performance. For the 30 nm thick TiNx thin films the enhancement factor is up to 6.6×104. The enhancement factor can be further improved several times by assisting ions. The main role of the assisting ions is to enhance the intensity and density of hot spots through the modification of surface morphology and plasmons. The study implies that high carrier concentration, and suitable size and high density of the grains and gaps are important for improving SERS performance. This work indicates the promising future of TiNx and assisting ions in the development of SERS active templates.",

keywords = "Assisting ions, Localized field, Surface enhanced Raman scattering, Titanium nitride",

author = "Shujun Zhao and Yue Zhao and Yujing Ran and Huiping Lu and Qian Guo and Chang Gao and Yanfeng Zhao and Wenjie Yan and Zhaotan Jiang and Hanchun Wu and Duan Zhang and Zhi Wang",

note = "Publisher Copyright: {\textcopyright} 2020 Elsevier B.V.",

year = "2020",

month = jun,

day = "1",

doi = "10.1016/j.nimb.2020.03.008",

language = "English",

volume = "472",

pages = "24--31",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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TY - JOUR

T1 - Surface enhanced Raman scattering on ion-beam-deposited TiNx/Si substrates

AU - Zhao, Shujun

AU - Zhao, Yue

AU - Ran, Yujing

AU - Lu, Huiping

AU - Guo, Qian

AU - Gao, Chang

AU - Zhao, Yanfeng

AU - Yan, Wenjie

AU - Jiang, Zhaotan

AU - Wu, Hanchun

AU - Zhang, Duan

AU - Wang, Zhi

PY - 2020/6/1

Y1 - 2020/6/1

N2 - Titanium nitride (TiNx) thin films were fabricated on silicon substrates by ion beam deposition. The surface enhanced Raman scattering (SERS) effect of the TiNx/Si substrates was studied with Rhodamine 6G as probe molecule. The results show that TiNx thin films can enhance the Raman signal, and the film with suitable thickness can significantly improve the SERS performance. For the 30 nm thick TiNx thin films the enhancement factor is up to 6.6×104. The enhancement factor can be further improved several times by assisting ions. The main role of the assisting ions is to enhance the intensity and density of hot spots through the modification of surface morphology and plasmons. The study implies that high carrier concentration, and suitable size and high density of the grains and gaps are important for improving SERS performance. This work indicates the promising future of TiNx and assisting ions in the development of SERS active templates.

AB - Titanium nitride (TiNx) thin films were fabricated on silicon substrates by ion beam deposition. The surface enhanced Raman scattering (SERS) effect of the TiNx/Si substrates was studied with Rhodamine 6G as probe molecule. The results show that TiNx thin films can enhance the Raman signal, and the film with suitable thickness can significantly improve the SERS performance. For the 30 nm thick TiNx thin films the enhancement factor is up to 6.6×104. The enhancement factor can be further improved several times by assisting ions. The main role of the assisting ions is to enhance the intensity and density of hot spots through the modification of surface morphology and plasmons. The study implies that high carrier concentration, and suitable size and high density of the grains and gaps are important for improving SERS performance. This work indicates the promising future of TiNx and assisting ions in the development of SERS active templates.

KW - Assisting ions

KW - Localized field

KW - Surface enhanced Raman scattering

KW - Titanium nitride

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U2 - 10.1016/j.nimb.2020.03.008

DO - 10.1016/j.nimb.2020.03.008

M3 - Article

AN - SCOPUS:85082764013

SN - 0168-583X

VL - 472

SP - 24

EP - 31

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Surface enhanced Raman scattering on ion-beam-deposited TiN_x/Si substrates

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Keywords

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