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Structural and dielectric properties of ion beam deposited titanium oxynitride thin films
Liuwei Jia, Huiping Lu, Yujing Ran, Shujun Zhao, Haonan Liu, Yinglan Li, Zhaotan Jiang, Zhi Wang*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
13
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(Scopus)