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Etching mechanism of high-aspect-ratio array structure
Gao Zhiting*, Ma Zhuang, Gao Lihong, Liu Qiang, Wang Yuxiang, Liu Yanbo, Wang Lidong, Hao Yuyang, Deng Yuanhan
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
3
Citations
(Scopus)