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Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical source
Sui Han Cui, Zhong Zhen Wu*, Shu Xiao, Liang Liang Liu, Bo Cong Zheng, Hai Lin, K. Y.Fu Ricky, Xiu Bo Tian, K. Paul, Wen Chang Tan, Feng Pan
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
9
Citations
(Scopus)