Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical source

Sui Han Cui, Zhong Zhen Wu*, Shu Xiao, Liang Liang Liu, Bo Cong Zheng, Hai Lin, K. Y.Fu Ricky, Xiu Bo Tian, K. Paul, Wen Chang Tan, Feng Pan

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

9 引用 (Scopus)

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Physics

Material Science

Engineering