摘要
Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 991-1003 |
| 页数 | 13 |
| 期刊 | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| 卷 | 32 |
| 期 | 10 |
| 出版状态 | 已出版 - 10月 2012 |