Abstract
Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 991-1003 |
| Number of pages | 13 |
| Journal | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| Volume | 32 |
| Issue number | 10 |
| Publication status | Published - Oct 2012 |
Keywords
- Femtosecond laser
- Microchannel
- Modification