A large-piston scanning electrothermal micromirror with a temperature control frame

Jiawen Luo; Zhiming Chen; Yingtao Ding; Qiao Chen; Jinling Ding; Jin Cheng; Huikai Xie

doi:10.1109/OMN.2016.7565914

A large-piston scanning electrothermal micromirror with a temperature control frame

Jiawen Luo, Zhiming Chen, Yingtao Ding, Qiao Chen, Jinling Ding, Jin Cheng, Huikai Xie

集成电路与电子学院

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

1 引用（Scopus）

摘要

An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.

源语言	英语
主期刊名	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
出版商	IEEE Computer Society
ISBN（电子版）	9781509010356
DOI	https://doi.org/10.1109/OMN.2016.7565914
出版状态	已出版 - 13 9月 2016
活动	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, 新加坡期限: 31 7月 2016 → 4 8月 2016

出版系列

姓名	International Conference on Optical MEMS and Nanophotonics
卷	2016-September
ISSN（印刷版）	2160-5033
ISSN（电子版）	2160-5041

会议

会议	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
国家/地区	新加坡
市	Singapore
时期	31/07/16 → 4/08/16

访问文件

10.1109/OMN.2016.7565914

其它文件与链接

链接到 Scopus 的出版物

引用此

Luo, J., Chen, Z., Ding, Y., Chen, Q., Ding, J., Cheng, J., & Xie, H. (2016). A large-piston scanning electrothermal micromirror with a temperature control frame. 在 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings 文章 7565914 (International Conference on Optical MEMS and Nanophotonics; 卷 2016-September). IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565914

@inproceedings{2753b2564c0c49ee9f48d8999408d668,

title = "A large-piston scanning electrothermal micromirror with a temperature control frame",

abstract = "An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.",

keywords = "Electrothermal Micromirror, Electrothermal bimorph actuator, Integrated Temperature Control, Large Piston, PID Control",

author = "Jiawen Luo and Zhiming Chen and Yingtao Ding and Qiao Chen and Jinling Ding and Jin Cheng and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",

year = "2016",

month = sep,

day = "13",

doi = "10.1109/OMN.2016.7565914",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",

address = "United States",

}

Luo, J, Chen, Z, Ding, Y, Chen, Q, Ding, J, Cheng, J & Xie, H 2016, A large-piston scanning electrothermal micromirror with a temperature control frame. 在 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings., 7565914, International Conference on Optical MEMS and Nanophotonics, 卷 2016-September, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, 新加坡, 31/07/16. https://doi.org/10.1109/OMN.2016.7565914

A large-piston scanning electrothermal micromirror with a temperature control frame. / Luo, Jiawen; Chen, Zhiming; Ding, Yingtao 等.
2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society, 2016. 7565914 (International Conference on Optical MEMS and Nanophotonics; 卷 2016-September).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A large-piston scanning electrothermal micromirror with a temperature control frame

AU - Luo, Jiawen

AU - Chen, Zhiming

AU - Ding, Yingtao

AU - Chen, Qiao

AU - Ding, Jinling

AU - Cheng, Jin

AU - Xie, Huikai

PY - 2016/9/13

Y1 - 2016/9/13

N2 - An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.

AB - An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.

KW - Electrothermal Micromirror

KW - Electrothermal bimorph actuator

KW - Integrated Temperature Control

KW - Large Piston

KW - PID Control

UR - http://www.scopus.com/inward/record.url?scp=84990178425&partnerID=8YFLogxK

U2 - 10.1109/OMN.2016.7565914

DO - 10.1109/OMN.2016.7565914

M3 - Conference contribution

AN - SCOPUS:84990178425

T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016

Y2 - 31 July 2016 through 4 August 2016

ER -

A large-piston scanning electrothermal micromirror with a temperature control frame

摘要

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会议

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