A large-piston scanning electrothermal micromirror with a temperature control frame

Jiawen Luo; Zhiming Chen; Yingtao Ding; Qiao Chen; Jinling Ding; Jin Cheng; Huikai Xie

doi:10.1109/OMN.2016.7565914

A large-piston scanning electrothermal micromirror with a temperature control frame

Jiawen Luo, Zhiming Chen, Yingtao Ding, Qiao Chen, Jinling Ding, Jin Cheng, Huikai Xie

School of Integrated Circuits and Electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.

Original language	English
Title of host publication	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781509010356
DOIs	https://doi.org/10.1109/OMN.2016.7565914
Publication status	Published - 13 Sept 2016
Event	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: 31 Jul 2016 → 4 Aug 2016

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2016-September
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/Territory	Singapore
City	Singapore
Period	31/07/16 → 4/08/16

Keywords

Electrothermal Micromirror
Electrothermal bimorph actuator
Integrated Temperature Control
Large Piston
PID Control

Access to Document

10.1109/OMN.2016.7565914

Cite this

Luo, J., Chen, Z., Ding, Y., Chen, Q., Ding, J., Cheng, J., & Xie, H. (2016). A large-piston scanning electrothermal micromirror with a temperature control frame. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings Article 7565914 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September). IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565914

@inproceedings{2753b2564c0c49ee9f48d8999408d668,

title = "A large-piston scanning electrothermal micromirror with a temperature control frame",

abstract = "An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.",

keywords = "Electrothermal Micromirror, Electrothermal bimorph actuator, Integrated Temperature Control, Large Piston, PID Control",

author = "Jiawen Luo and Zhiming Chen and Yingtao Ding and Qiao Chen and Jinling Ding and Jin Cheng and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",

year = "2016",

month = sep,

day = "13",

doi = "10.1109/OMN.2016.7565914",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",

address = "United States",

}

Luo, J, Chen, Z , Ding, Y, Chen, Q, Ding, J, Cheng, J & Xie, H 2016, A large-piston scanning electrothermal micromirror with a temperature control frame. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings., 7565914, International Conference on Optical MEMS and Nanophotonics, vol. 2016-September, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 31/07/16. https://doi.org/10.1109/OMN.2016.7565914

A large-piston scanning electrothermal micromirror with a temperature control frame. / Luo, Jiawen; Chen, Zhiming ; Ding, Yingtao et al.
2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society, 2016. 7565914 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A large-piston scanning electrothermal micromirror with a temperature control frame

AU - Luo, Jiawen

AU - Chen, Zhiming

AU - Ding, Yingtao

AU - Chen, Qiao

AU - Ding, Jinling

AU - Cheng, Jin

AU - Xie, Huikai

PY - 2016/9/13

Y1 - 2016/9/13

N2 - An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.

AB - An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.

KW - Electrothermal Micromirror

KW - Electrothermal bimorph actuator

KW - Integrated Temperature Control

KW - Large Piston

KW - PID Control

UR - http://www.scopus.com/inward/record.url?scp=84990178425&partnerID=8YFLogxK

U2 - 10.1109/OMN.2016.7565914

DO - 10.1109/OMN.2016.7565914

M3 - Conference contribution

AN - SCOPUS:84990178425

T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016

Y2 - 31 July 2016 through 4 August 2016

ER -

A large-piston scanning electrothermal micromirror with a temperature control frame

Abstract

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Conference

Keywords

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