@inproceedings{2753b2564c0c49ee9f48d8999408d668,
title = "A large-piston scanning electrothermal micromirror with a temperature control frame",
abstract = "An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.",
keywords = "Electrothermal Micromirror, Electrothermal bimorph actuator, Integrated Temperature Control, Large Piston, PID Control",
author = "Jiawen Luo and Zhiming Chen and Yingtao Ding and Qiao Chen and Jinling Ding and Jin Cheng and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",
year = "2016",
month = sep,
day = "13",
doi = "10.1109/OMN.2016.7565914",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",
address = "United States",
}