Structural and optical properties of Cu–N codoped ZnO thin films deposited by magnetron cosputtering

Haonan Liu; Yujing Ran; Liuwei Jia; Huiping Lu; Shujun Zhao; Hongkang Zhao; Yinglan Li; Zhaotan Jiang; Zhi Wang

doi:10.1007/s10854-018-9032-1

Structural and optical properties of Cu–N codoped ZnO thin films deposited by magnetron cosputtering

Haonan Liu, Yujing Ran, Liuwei Jia, Huiping Lu, Shujun Zhao, Hongkang Zhao, Yinglan Li, Zhaotan Jiang, Zhi Wang^*

^*Corresponding author for this work

School of Physics

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

ZnO films codoped by copper and nitrogen were prepared by magnetron cosputtering. The effects of this codoping on the structural and optical properties of ZnO films were systematically studied. The results show that Cu–N codoping didn’t affect the optimal orientation. Cu–N codoping can enlarge the grain size, enhance the crystallinity, reduce the stress and lead to denser and smoother surface. A significant red shift of absorption edge and gap-narrowing effect resulting from codoping were found in ZnO films. Cu-doping, N-doping, and oxygen vacancy are the main factors leading to property modification of the ZnO films. By Cu–N codoping, we can modulate the microstructure and optical properties of ZnO films in a wider range.

Original language	English
Pages (from-to)	9901-9907
Number of pages	7
Journal	Journal of Materials Science: Materials in Electronics
Volume	29
Issue number	12
DOIs	https://doi.org/10.1007/s10854-018-9032-1
Publication status	Published - 1 Jun 2018

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@article{6902e0d9b0064256bc478a9bb28d50ad,

title = "Structural and optical properties of Cu–N codoped ZnO thin films deposited by magnetron cosputtering",

abstract = "ZnO films codoped by copper and nitrogen were prepared by magnetron cosputtering. The effects of this codoping on the structural and optical properties of ZnO films were systematically studied. The results show that Cu–N codoping didn{\textquoteright}t affect the optimal orientation. Cu–N codoping can enlarge the grain size, enhance the crystallinity, reduce the stress and lead to denser and smoother surface. A significant red shift of absorption edge and gap-narrowing effect resulting from codoping were found in ZnO films. Cu-doping, N-doping, and oxygen vacancy are the main factors leading to property modification of the ZnO films. By Cu–N codoping, we can modulate the microstructure and optical properties of ZnO films in a wider range.",

author = "Haonan Liu and Yujing Ran and Liuwei Jia and Huiping Lu and Shujun Zhao and Hongkang Zhao and Yinglan Li and Zhaotan Jiang and Zhi Wang",

note = "Publisher Copyright: {\textcopyright} 2018, Springer Science+Business Media, LLC, part of Springer Nature.",

year = "2018",

month = jun,

day = "1",

doi = "10.1007/s10854-018-9032-1",

language = "English",

volume = "29",

pages = "9901--9907",

journal = "Journal of Materials Science: Materials in Electronics",

issn = "0957-4522",

publisher = "Springer New York",

number = "12",

}

TY - JOUR

T1 - Structural and optical properties of Cu–N codoped ZnO thin films deposited by magnetron cosputtering

AU - Liu, Haonan

AU - Ran, Yujing

AU - Jia, Liuwei

AU - Lu, Huiping

AU - Zhao, Shujun

AU - Zhao, Hongkang

AU - Li, Yinglan

AU - Jiang, Zhaotan

AU - Wang, Zhi

PY - 2018/6/1

Y1 - 2018/6/1

N2 - ZnO films codoped by copper and nitrogen were prepared by magnetron cosputtering. The effects of this codoping on the structural and optical properties of ZnO films were systematically studied. The results show that Cu–N codoping didn’t affect the optimal orientation. Cu–N codoping can enlarge the grain size, enhance the crystallinity, reduce the stress and lead to denser and smoother surface. A significant red shift of absorption edge and gap-narrowing effect resulting from codoping were found in ZnO films. Cu-doping, N-doping, and oxygen vacancy are the main factors leading to property modification of the ZnO films. By Cu–N codoping, we can modulate the microstructure and optical properties of ZnO films in a wider range.

AB - ZnO films codoped by copper and nitrogen were prepared by magnetron cosputtering. The effects of this codoping on the structural and optical properties of ZnO films were systematically studied. The results show that Cu–N codoping didn’t affect the optimal orientation. Cu–N codoping can enlarge the grain size, enhance the crystallinity, reduce the stress and lead to denser and smoother surface. A significant red shift of absorption edge and gap-narrowing effect resulting from codoping were found in ZnO films. Cu-doping, N-doping, and oxygen vacancy are the main factors leading to property modification of the ZnO films. By Cu–N codoping, we can modulate the microstructure and optical properties of ZnO films in a wider range.

UR - http://www.scopus.com/inward/record.url?scp=85045058664&partnerID=8YFLogxK

U2 - 10.1007/s10854-018-9032-1

DO - 10.1007/s10854-018-9032-1

M3 - Article

AN - SCOPUS:85045058664

SN - 0957-4522

VL - 29

SP - 9901

EP - 9907

JO - Journal of Materials Science: Materials in Electronics

JF - Journal of Materials Science: Materials in Electronics

IS - 12

ER -

Structural and optical properties of Cu–N codoped ZnO thin films deposited by magnetron cosputtering

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