@inproceedings{4d47b0f9eed34eeaab057b4e0e389084,
title = "Structural and epsilon-near-zero characteristics of titanium carbide films with different carbon content",
abstract = "The face-centered cubic (Fcc) structured TiCx films with different C content were prepared by reactive magnetron sputtering deposition. The influence of carbon content on the TiCx crystal structure and dielectric properties were studied. All the films are fcc structured with (111) and (200) preferential orientation. Additionally, a tunable dual epsilon-near-zero characteristic is exhibited in visible and near infrared region. With C content increasing, the screened plasma frequency decreases. The calculated electronic states shows that atom vacancy is the main defect type underlying the optical response, while Ti antisites, Ti interstitials, Ti dumbbells or Ti interstitials may be the main factors influencing the crystal structure.",
keywords = "Dielectric function, Epsilon-near-zero, Thin films, Titanium carbide",
author = "Guangxiao Hu and Zhaotan Jiang and Zhi Wang",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; 7th Global Intelligent Industry Conference, GIIC 2024 ; Conference date: 30-03-2024 Through 01-04-2024",
year = "2024",
doi = "10.1117/12.3032114",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xingjun Wang",
booktitle = "Seventh Global Intelligent Industry Conference, GIIC 2024",
address = "United States",
}