Structural and epsilon-near-zero characteristics of titanium carbide films with different carbon content

Guangxiao Hu, Zhaotan Jiang, Zhi Wang*

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

The face-centered cubic (Fcc) structured TiCx films with different C content were prepared by reactive magnetron sputtering deposition. The influence of carbon content on the TiCx crystal structure and dielectric properties were studied. All the films are fcc structured with (111) and (200) preferential orientation. Additionally, a tunable dual epsilon-near-zero characteristic is exhibited in visible and near infrared region. With C content increasing, the screened plasma frequency decreases. The calculated electronic states shows that atom vacancy is the main defect type underlying the optical response, while Ti antisites, Ti interstitials, Ti dumbbells or Ti interstitials may be the main factors influencing the crystal structure.

源语言英语
主期刊名Seventh Global Intelligent Industry Conference, GIIC 2024
编辑Xingjun Wang
出版商SPIE
ISBN(电子版)9781510682986
DOI
出版状态已出版 - 2024
活动7th Global Intelligent Industry Conference, GIIC 2024 - Shenzhen, 中国
期限: 30 3月 20241 4月 2024

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
13278
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议7th Global Intelligent Industry Conference, GIIC 2024
国家/地区中国
Shenzhen
时期30/03/241/04/24

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