On the mechanical behavior of LIGA nickel

He Guang; Geng Chen Shi

doi:10.1109/NEMS.2009.5068689

On the mechanical behavior of LIGA nickel

He Guang^*, Geng Chen Shi

^*Corresponding author for this work

School of Mechatronical Engineering

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

We get the mechanical behavior of pure nickel material produced by the LIGA method in Institute of High Energy Physics Chinese Academy of Sciences through tensile tests. The average Young's modulus is 215 GPa, which is almost exactly the same as measured on the device, NanoIndentation. And the LIGA nickel material has yield and ultimate strengths on the order of 1049 MPa and 1448 MPa respectively. After comparing, we get they are all bigger, especially the yield and ultimate strengths, than that obtained previously by other MEMS research organizations.

Original language	English
Title of host publication	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages	758-762
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2009.5068689
Publication status	Published - 2009
Event	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: 5 Jan 2009 → 8 Jan 2009

Publication series

Name	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Conference

Conference	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Country/Territory	China
City	Shenzhen
Period	5/01/09 → 8/01/09

Keywords

LIGA
Nickel
Strength
Young's modulus

Access to Document

10.1109/NEMS.2009.5068689

Cite this

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title = "On the mechanical behavior of LIGA nickel",

abstract = "We get the mechanical behavior of pure nickel material produced by the LIGA method in Institute of High Energy Physics Chinese Academy of Sciences through tensile tests. The average Young's modulus is 215 GPa, which is almost exactly the same as measured on the device, NanoIndentation. And the LIGA nickel material has yield and ultimate strengths on the order of 1049 MPa and 1448 MPa respectively. After comparing, we get they are all bigger, especially the yield and ultimate strengths, than that obtained previously by other MEMS research organizations.",

keywords = "LIGA, Nickel, Strength, Young's modulus",

author = "He Guang and Shi, {Geng Chen}",

year = "2009",

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series = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

pages = "758--762",

booktitle = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

note = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 ; Conference date: 05-01-2009 Through 08-01-2009",

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Guang, H & Shi, GC 2009, On the mechanical behavior of LIGA nickel. in 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009., 5068689, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, pp. 758-762, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China, 5/01/09. https://doi.org/10.1109/NEMS.2009.5068689

On the mechanical behavior of LIGA nickel. / Guang, He; Shi, Geng Chen.
4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 758-762 5068689 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Shi, Geng Chen

PY - 2009

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N2 - We get the mechanical behavior of pure nickel material produced by the LIGA method in Institute of High Energy Physics Chinese Academy of Sciences through tensile tests. The average Young's modulus is 215 GPa, which is almost exactly the same as measured on the device, NanoIndentation. And the LIGA nickel material has yield and ultimate strengths on the order of 1049 MPa and 1448 MPa respectively. After comparing, we get they are all bigger, especially the yield and ultimate strengths, than that obtained previously by other MEMS research organizations.

AB - We get the mechanical behavior of pure nickel material produced by the LIGA method in Institute of High Energy Physics Chinese Academy of Sciences through tensile tests. The average Young's modulus is 215 GPa, which is almost exactly the same as measured on the device, NanoIndentation. And the LIGA nickel material has yield and ultimate strengths on the order of 1049 MPa and 1448 MPa respectively. After comparing, we get they are all bigger, especially the yield and ultimate strengths, than that obtained previously by other MEMS research organizations.

KW - LIGA

KW - Nickel

KW - Strength

KW - Young's modulus

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Y2 - 5 January 2009 through 8 January 2009

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On the mechanical behavior of LIGA nickel

Abstract

Publication series

Conference

Keywords

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