摘要
We get the mechanical behavior of pure nickel material produced by the LIGA method in Institute of High Energy Physics Chinese Academy of Sciences through tensile tests. The average Young's modulus is 215 GPa, which is almost exactly the same as measured on the device, NanoIndentation. And the LIGA nickel material has yield and ultimate strengths on the order of 1049 MPa and 1448 MPa respectively. After comparing, we get they are all bigger, especially the yield and ultimate strengths, than that obtained previously by other MEMS research organizations.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
| 页 | 758-762 |
| 页数 | 5 |
| DOI | |
| 出版状态 | 已出版 - 2009 |
| 活动 | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, 中国 期限: 5 1月 2009 → 8 1月 2009 |
出版系列
| 姓名 | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
|---|
会议
| 会议 | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Shenzhen |
| 时期 | 5/01/09 → 8/01/09 |
指纹
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Guang, H., & Shi, G. C. (2009). On the mechanical behavior of LIGA nickel. 在 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (页码 758-762). 文章 5068689 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068689