Abstract
At the beginning, it is presented that several theoretical and key technique problems among super-precision and nanometer measurement for circle and cylindrical contour, including: periodic reappearance of straight line datum movement; harmonic suppression in the measurement for circle contour; datum error's recognition and separation in the measurement for cylindrical contour; the problem of information integrality in the measurement for cylindrical contour. Then it is mainly introduced that the development research of super-precision measurement for circle and cylindrical contour, including: error separation technology with non-harmonic suppression; laser monitoring technology of straight line datum movement; error separation technology among datums, etc. Finally, give a vista of new promising measurement technique, such as the contour measurement based on the confocal microscopy, optical measuring techniques with non-datums and so on.
| Original language | English |
|---|---|
| Pages (from-to) | 21-26 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4222 |
| DOIs | |
| Publication status | Published - 2000 |
| Externally published | Yes |
| Event | Process Control and Inspection for Industry - Beijing, China Duration: 8 Nov 2000 → 10 Nov 2000 |