Development and application of nano-moire method with high-resolution microscopy

Some novel nano-moire methods have been developed. An introduction of these new methods is offered, which can be realized under the atomic force microscope, scanning tunneling microscope, as well as the transmission electron microscope. These nano-moire methods are able to offer quantitative analysis to nano-deformation of object. The measurement principles and experimental technique of these methods are described. A new digital nano-moire technique is proposed. Some typical applications to these methods are discussed. The experimental results demonstrate the feasibility of these methods and also verify the methods can offer a high sensitivity for displacement measurement with nano-meter spatial resolution.