A novel nano-Moiré method with scanning tunneling microscope (STM)

Zhanwei Liu; Huimin Xie; Daining Fang; Haixia Shang; Fulong Dai

doi:10.1016/j.jmatprotec.2004.01.042

A novel nano-Moiré method with scanning tunneling microscope (STM)

Zhanwei Liu, Huimin Xie, Daining Fang, Haixia Shang, Fulong Dai

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

In this paper, a new STM nano-Moiré method is presented which allows quantitative analysis to nanoscopic deformation of matter. In the measurement, Moiré patterns are generated by interfering the scanning lines of STM with the atomic lattice of crystal material. The measurement principles of STM nano-Moiré and experimental techniques are described in detail. In addition, a grating replication method is also developed. The residual strain around an inclusion or defect on a high-orientated pyrolytic graphite (HOPG) sample is measured using this method. The successful experimental results demonstrate the feasibility of this method and also verify the method can offer a high sensitivity for displacement measurement with nanometer spatial resolution.

Original language	English
Pages (from-to)	77-82
Number of pages	6
Journal	Journal of Materials Processing Technology
Volume	148
Issue number	1
DOIs	https://doi.org/10.1016/j.jmatprotec.2004.01.042
Publication status	Published - 1 May 2004

Keywords

Crystal lattice
Nano-Moiré
Nano-metrology
Scanning tunneling microscope

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10.1016/j.jmatprotec.2004.01.042

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title = "A novel nano-Moir{\'e} method with scanning tunneling microscope (STM)",

abstract = "In this paper, a new STM nano-Moir{\'e} method is presented which allows quantitative analysis to nanoscopic deformation of matter. In the measurement, Moir{\'e} patterns are generated by interfering the scanning lines of STM with the atomic lattice of crystal material. The measurement principles of STM nano-Moir{\'e} and experimental techniques are described in detail. In addition, a grating replication method is also developed. The residual strain around an inclusion or defect on a high-orientated pyrolytic graphite (HOPG) sample is measured using this method. The successful experimental results demonstrate the feasibility of this method and also verify the method can offer a high sensitivity for displacement measurement with nanometer spatial resolution.",

keywords = "Crystal lattice, Nano-Moir{\'e}, Nano-metrology, Scanning tunneling microscope",

author = "Zhanwei Liu and Huimin Xie and Daining Fang and Haixia Shang and Fulong Dai",

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T1 - A novel nano-Moiré method with scanning tunneling microscope (STM)

AU - Liu, Zhanwei

AU - Xie, Huimin

AU - Fang, Daining

AU - Shang, Haixia

AU - Dai, Fulong

PY - 2004/5/1

Y1 - 2004/5/1

N2 - In this paper, a new STM nano-Moiré method is presented which allows quantitative analysis to nanoscopic deformation of matter. In the measurement, Moiré patterns are generated by interfering the scanning lines of STM with the atomic lattice of crystal material. The measurement principles of STM nano-Moiré and experimental techniques are described in detail. In addition, a grating replication method is also developed. The residual strain around an inclusion or defect on a high-orientated pyrolytic graphite (HOPG) sample is measured using this method. The successful experimental results demonstrate the feasibility of this method and also verify the method can offer a high sensitivity for displacement measurement with nanometer spatial resolution.

AB - In this paper, a new STM nano-Moiré method is presented which allows quantitative analysis to nanoscopic deformation of matter. In the measurement, Moiré patterns are generated by interfering the scanning lines of STM with the atomic lattice of crystal material. The measurement principles of STM nano-Moiré and experimental techniques are described in detail. In addition, a grating replication method is also developed. The residual strain around an inclusion or defect on a high-orientated pyrolytic graphite (HOPG) sample is measured using this method. The successful experimental results demonstrate the feasibility of this method and also verify the method can offer a high sensitivity for displacement measurement with nanometer spatial resolution.

KW - Crystal lattice

KW - Nano-Moiré

KW - Nano-metrology

KW - Scanning tunneling microscope

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SN - 0924-0136

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SP - 77

EP - 82

JO - Journal of Materials Processing Technology

JF - Journal of Materials Processing Technology

IS - 1

ER -

A novel nano-Moiré method with scanning tunneling microscope (STM)

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Keywords

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