Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching
Tianfeng Zhou*, Ruzhen Xu, Benshuai Ruan, Yupeng He, Zhiqiang Liang, Xibin Wang
*此作品的通讯作者
科研成果: 期刊稿件 › 文章 › 同行评审
19
引用
（Scopus）