Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

Tianfeng Zhou*, Ruzhen Xu, Benshuai Ruan, Yupeng He, Zhiqiang Liang, Xibin Wang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

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