TY - GEN
T1 - Sensitivity Improvement of Micro Thermal Convective Accelerometer with Structure Optimization
T2 - 18th IEEE Sensors, SENSORS 2019
AU - Wang, Xiaoyi
AU - Lim, Gyuha
AU - Xu, Wei
AU - Lee, Yi Kuen
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/10
Y1 - 2019/10
N2 - For the first time, we conduct the structure optimization of the micro thermal convective accelerometer (MTCA). Firstly, the effects of sensor size (L), the location of detectors (D) and the cover height (H) on the performance are deeply analyzed by means of the proposed theoretical model. Six types of micro thermal convective accelerometers with parallel-stack detectors are fabricated by means of the CMOS compatible fabrication process to enhance the sensitivity. Both the theoretical and experimental results demonstrated that larger sensor size and cover height could improve the sensitivity of MTCA. Additionally, increasing sensor size would lead to a shift of the normalized optimal distance to the heater side. By means of the structure optimization and the parallel-stack method with three pairs of detectors, a MTCA with the sensor length of 1600μm is achieved with an outstanding sensitivity of 7075μV/g (gain=1) and normalized sensitivity/power (S/P) ratio of 201.4 μV/g/mW, which is twenty-fold larger than the state of art.
AB - For the first time, we conduct the structure optimization of the micro thermal convective accelerometer (MTCA). Firstly, the effects of sensor size (L), the location of detectors (D) and the cover height (H) on the performance are deeply analyzed by means of the proposed theoretical model. Six types of micro thermal convective accelerometers with parallel-stack detectors are fabricated by means of the CMOS compatible fabrication process to enhance the sensitivity. Both the theoretical and experimental results demonstrated that larger sensor size and cover height could improve the sensitivity of MTCA. Additionally, increasing sensor size would lead to a shift of the normalized optimal distance to the heater side. By means of the structure optimization and the parallel-stack method with three pairs of detectors, a MTCA with the sensor length of 1600μm is achieved with an outstanding sensitivity of 7075μV/g (gain=1) and normalized sensitivity/power (S/P) ratio of 201.4 μV/g/mW, which is twenty-fold larger than the state of art.
KW - Micro thermal convective accelerometer
KW - Structure optimization
KW - sensitivity improvement
KW - theoretical model
UR - http://www.scopus.com/inward/record.url?scp=85078696112&partnerID=8YFLogxK
U2 - 10.1109/SENSORS43011.2019.8956837
DO - 10.1109/SENSORS43011.2019.8956837
M3 - Conference contribution
AN - SCOPUS:85078696112
T3 - Proceedings of IEEE Sensors
BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 27 October 2019 through 30 October 2019
ER -
