Performance Enhanced Thermal Flow Sensor with Novel Dual-Heater Structure Using CMOS Compatible Fabrication Process

Zhongyi Liu, Ruoqin Wang, Gai Yang, Xinyuan Zhang, Rui Jiao, Xuejiao Li, Jiali Qi, Hongyu Yu, Huikai Xie*, Xiaoyi Wang*

*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

1 引用 （Scopus）

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