@inproceedings{3417c3e7e88c48c4becd913ad78eef8c,
title = "Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range",
abstract = "This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.",
keywords = "Fourier transform spectrometer, MEMS scanning mirror, large piston scan, microspectrometer, thermal actuator",
author = "H. Xie and S. Lan and D. Wang and W. Wang and J. Sun and H. Liu and J. Cheng and J. Ding and Z. Qin and Q. Chen and H. Kang and Z. Tian",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 14th IEEE SENSORS ; Conference date: 01-11-2015 Through 04-11-2015",
year = "2015",
month = dec,
day = "31",
doi = "10.1109/ICSENS.2015.7370315",
language = "English",
series = "2015 IEEE SENSORS - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 IEEE SENSORS - Proceedings",
address = "United States",
}