Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

H. Xie; S. Lan; D. Wang; W. Wang; J. Sun; H. Liu; J. Cheng; J. Ding; Z. Qin; Q. Chen; H. Kang; Z. Tian

doi:10.1109/ICSENS.2015.7370315

Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

H. Xie, S. Lan, D. Wang, W. Wang, J. Sun, H. Liu, J. Cheng, J. Ding, Z. Qin, Q. Chen, H. Kang, Z. Tian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

10 引用（Scopus）

摘要

This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.

源语言	英语
主期刊名	2015 IEEE SENSORS - Proceedings
出版商	Institute of Electrical and Electronics Engineers Inc.
ISBN（电子版）	9781479982028
DOI	https://doi.org/10.1109/ICSENS.2015.7370315
出版状态	已出版 - 31 12月 2015
已对外发布	是
活动	14th IEEE SENSORS - Busan, 韩国期限: 1 11月 2015 → 4 11月 2015

出版系列

姓名	2015 IEEE SENSORS - Proceedings

会议

会议	14th IEEE SENSORS
国家/地区	韩国
市	Busan
时期	1/11/15 → 4/11/15

访问文件

10.1109/ICSENS.2015.7370315

其它文件与链接

链接到 Scopus 的出版物

引用此

Xie, H., Lan, S., Wang, D., Wang, W., Sun, J., Liu, H., Cheng, J., Ding, J., Qin, Z., Chen, Q., Kang, H., & Tian, Z. (2015). Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range. 在 2015 IEEE SENSORS - Proceedings 文章 7370315 (2015 IEEE SENSORS - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2015.7370315

@inproceedings{3417c3e7e88c48c4becd913ad78eef8c,

title = "Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range",

abstract = "This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.",

keywords = "Fourier transform spectrometer, MEMS scanning mirror, large piston scan, microspectrometer, thermal actuator",

author = "H. Xie and S. Lan and D. Wang and W. Wang and J. Sun and H. Liu and J. Cheng and J. Ding and Z. Qin and Q. Chen and H. Kang and Z. Tian",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 14th IEEE SENSORS ; Conference date: 01-11-2015 Through 04-11-2015",

year = "2015",

month = dec,

day = "31",

doi = "10.1109/ICSENS.2015.7370315",

language = "English",

series = "2015 IEEE SENSORS - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2015 IEEE SENSORS - Proceedings",

address = "United States",

}

Xie, H, Lan, S, Wang, D, Wang, W, Sun, J, Liu, H, Cheng, J, Ding, J, Qin, Z, Chen, Q, Kang, H & Tian, Z 2015, Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range. 在 2015 IEEE SENSORS - Proceedings., 7370315, 2015 IEEE SENSORS - Proceedings, Institute of Electrical and Electronics Engineers Inc., 14th IEEE SENSORS, Busan, 韩国, 1/11/15. https://doi.org/10.1109/ICSENS.2015.7370315

TY - GEN

T1 - Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

AU - Xie, H.

AU - Lan, S.

AU - Wang, D.

AU - Wang, W.

AU - Sun, J.

AU - Liu, H.

AU - Cheng, J.

AU - Ding, J.

AU - Qin, Z.

AU - Chen, Q.

AU - Kang, H.

AU - Tian, Z.

PY - 2015/12/31

Y1 - 2015/12/31

N2 - This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.

AB - This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.

KW - Fourier transform spectrometer

KW - MEMS scanning mirror

KW - large piston scan

KW - microspectrometer

KW - thermal actuator

UR - http://www.scopus.com/inward/record.url?scp=84963611868&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2015.7370315

DO - 10.1109/ICSENS.2015.7370315

M3 - Conference contribution

AN - SCOPUS:84963611868

T3 - 2015 IEEE SENSORS - Proceedings

BT - 2015 IEEE SENSORS - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 14th IEEE SENSORS

Y2 - 1 November 2015 through 4 November 2015

ER -

Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

摘要

出版系列

会议

访问文件

其它文件与链接

指纹

引用此