Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

H. Xie; S. Lan; D. Wang; W. Wang; J. Sun; H. Liu; J. Cheng; J. Ding; Z. Qin; Q. Chen; H. Kang; Z. Tian

doi:10.1109/ICSENS.2015.7370315

Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

H. Xie, S. Lan, D. Wang, W. Wang, J. Sun, H. Liu, J. Cheng, J. Ding, Z. Qin, Q. Chen, H. Kang, Z. Tian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

10 Citations (Scopus)

Abstract

This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.

Original language	English
Title of host publication	2015 IEEE SENSORS - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479982028
DOIs	https://doi.org/10.1109/ICSENS.2015.7370315
Publication status	Published - 31 Dec 2015
Externally published	Yes
Event	14th IEEE SENSORS - Busan, Korea, Republic of Duration: 1 Nov 2015 → 4 Nov 2015

Publication series

Name	2015 IEEE SENSORS - Proceedings

Conference

Conference	14th IEEE SENSORS
Country/Territory	Korea, Republic of
City	Busan
Period	1/11/15 → 4/11/15

Keywords

Fourier transform spectrometer
MEMS scanning mirror
large piston scan
microspectrometer
thermal actuator

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10.1109/ICSENS.2015.7370315

Cite this

Xie, H., Lan, S., Wang, D., Wang, W., Sun, J., Liu, H., Cheng, J., Ding, J., Qin, Z., Chen, Q., Kang, H., & Tian, Z. (2015). Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range. In 2015 IEEE SENSORS - Proceedings Article 7370315 (2015 IEEE SENSORS - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2015.7370315

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title = "Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range",

abstract = "This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.",

keywords = "Fourier transform spectrometer, MEMS scanning mirror, large piston scan, microspectrometer, thermal actuator",

author = "H. Xie and S. Lan and D. Wang and W. Wang and J. Sun and H. Liu and J. Cheng and J. Ding and Z. Qin and Q. Chen and H. Kang and Z. Tian",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 14th IEEE SENSORS ; Conference date: 01-11-2015 Through 04-11-2015",

year = "2015",

month = dec,

day = "31",

doi = "10.1109/ICSENS.2015.7370315",

language = "English",

series = "2015 IEEE SENSORS - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2015 IEEE SENSORS - Proceedings",

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Xie, H, Lan, S, Wang, D, Wang, W, Sun, J, Liu, H, Cheng, J, Ding, J, Qin, Z, Chen, Q, Kang, H & Tian, Z 2015, Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range. in 2015 IEEE SENSORS - Proceedings., 7370315, 2015 IEEE SENSORS - Proceedings, Institute of Electrical and Electronics Engineers Inc., 14th IEEE SENSORS, Busan, Korea, Republic of, 1/11/15. https://doi.org/10.1109/ICSENS.2015.7370315

Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range. / Xie, H.; Lan, S.; Wang, D. et al.
2015 IEEE SENSORS - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. 7370315 (2015 IEEE SENSORS - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

AU - Xie, H.

AU - Lan, S.

AU - Wang, D.

AU - Wang, W.

AU - Sun, J.

AU - Liu, H.

AU - Cheng, J.

AU - Ding, J.

AU - Qin, Z.

AU - Chen, Q.

AU - Kang, H.

AU - Tian, Z.

PY - 2015/12/31

Y1 - 2015/12/31

N2 - This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.

AB - This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.

KW - Fourier transform spectrometer

KW - MEMS scanning mirror

KW - large piston scan

KW - microspectrometer

KW - thermal actuator

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U2 - 10.1109/ICSENS.2015.7370315

DO - 10.1109/ICSENS.2015.7370315

M3 - Conference contribution

AN - SCOPUS:84963611868

T3 - 2015 IEEE SENSORS - Proceedings

BT - 2015 IEEE SENSORS - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 14th IEEE SENSORS

Y2 - 1 November 2015 through 4 November 2015

ER -

Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

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