Low-Cost Parylene Based Micro Humidity Sensor for Integrated Human Thermal Comfort Sensing

Engineering

• Capacitive 25%
• Chemical Vapor Deposition 25%
• Humidity Sensor 100%
• Intelligent Buildings 25%
• Microelectromechanical System 25%
• Operating Frequency 25%
• Operating Voltage 25%
• Platinum Electrode 25%
• Relative Humidity 100%
• Room Temperature 25%
• Silicon Substrate 25%
• Size Effect 25%
• Thermal Comfort 100%
• Thin Films 25%
• Vapor Deposition 25%

Material Science

• Capacitance 50%
• Chemical Vapor Deposition 50%
• Humidity Sensor 100%
• Microelectromechanical System 50%
• Platinum 50%
• Silicon 50%
• Thin Films 50%

Chemistry

• Deposition Technique 100%