Large-aperture, widely and linearly tunable, electromagnetically actuated MEMS Fabry-Perot filtering chips for longwave infrared spectral imaging

Kui Zhou, Xiejun Wang, Xialei Jing, Fei Wang, Qian Zhang, Fei Chen, Jia Hao, Chenwei Deng, Jian Zhou, Yiting Yu*

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

12 引用 （Scopus）

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Engineering

Physics

Material Science