Large-aperture, widely and linearly tunable, electromagnetically actuated MEMS Fabry-Perot filtering chips for longwave infrared spectral imaging

Kui Zhou, Xiejun Wang, Xialei Jing, Fei Wang, Qian Zhang, Fei Chen, Jia Hao, Chenwei Deng, Jian Zhou, Yiting Yu*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

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