Improved performance of pentacene OTFT by incorporating Ti in NdON gate dielectric

Y. X. Ma, L. N. Liu, W. M. Tang, P. T. Lai

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

Pentacene organic thin-film transistors (OTFTs) with high-k NdON gate dielectric incorporating different Ti contents are fabricated and their physical and electrical characteristics are studied. With appropriate Ti content, the OTFT with NdTiON as gate dielectric can achieve improved performance, e.g. a carrier mobility of 0.80 cm2/V·s, a small threshold voltage of -1.25 V, and a small sub-threshold swing of 0.13 V/dec. The AFM results of the pentacene layer and the dielectric layer reveal that incorporating Ti into NdON can obtain a smoother dielectric surface, which should be due to the suppressed hygroscopicity of Nd oxide caused by the Ti incorporation. Both the smoother dielectric surface and thus larger pentacene grains grown are responsible for the improved carrier mobility of the device.

源语言英语
主期刊名EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits
出版商Institute of Electrical and Electronics Engineers Inc.
1-2
页数2
ISBN(电子版)9781538629079
DOI
出版状态已出版 - 1 12月 2017
已对外发布
活动13th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2017 - Hsinchu, 中国台湾
期限: 18 10月 201720 10月 2017

出版系列

姓名EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits
2017-January

会议

会议13th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2017
国家/地区中国台湾
Hsinchu
时期18/10/1720/10/17

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