Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using 0.35\boldsymbol{\mu}\mathbf{m} CMOS MEMS Technology

Wei Xu, Ruijie Wang, Xiaoyi Wang, Basant Mousa, Yi Kuen Lee

科研成果: 书/报告/会议事项章节会议稿件同行评审

6 引用 (Scopus)

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Engineering

Material Science