High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching

Tian Qiang, Cong Wang*, Ming Qing Liu, Kishor Kumar Adhikari, Jun Ge Liang, Lei Wang, Yang Li, Yu Ming Wu, Guo Hui Yang, Fan Yi Meng, Jia Hui Fu, Qun Wu, Nam Young Kim, Zhao Yao

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

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Material Science