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High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching
Tian Qiang, Cong Wang*, Ming Qing Liu, Kishor Kumar Adhikari, Jun Ge Liang, Lei Wang, Yang Li, Yu Ming Wu, Guo Hui Yang, Fan Yi Meng, Jia Hui Fu, Qun Wu, Nam Young Kim, Zhao Yao
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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(Scopus)