Flat metallic surface gratings with sub-10 nm gaps controlled by atomic-layer deposition

Borui Chen, Dengxin Ji, Alec Cheney, Nan Zhang, Haomin Song, Xie Zeng, Tim Thomay, Qiaoqiang Gan, Alexander Cartwright

科研成果: 期刊稿件 › 文章 › 同行评审

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Material Science