Flat metallic surface gratings with sub-10 nm gaps controlled by atomic-layer deposition

Borui Chen, Dengxin Ji, Alec Cheney, Nan Zhang, Haomin Song, Xie Zeng, Tim Thomay, Qiaoqiang Gan, Alexander Cartwright

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

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Material Science