Design and simulation of high efficient MEMS electrothermal actuator

Rongchang Song, Guilei Wang, Junbo Wang, Yueyue Shen, Chao Lv

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

指纹

探究 'Design and simulation of high efficient MEMS electrothermal actuator' 的科研主题。它们共同构成独一无二的指纹。

Engineering

Material Science