@inproceedings{d89bf2ef6d6f450cb045c664e1248fd5,
title = "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT",
abstract = "This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.",
keywords = "MEMS speaker, ceramic PZT, loud speaker, microspeaker, piezoelectric",
author = "Haoran Wang and Mengyuan Li and Yuanyuan Yu and Zhenfang Chen and Yingtao DIng and Huabei Jiang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",
year = "2019",
month = jun,
doi = "10.1109/TRANSDUCERS.2019.8808528",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "857--860",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
address = "United States",
}