A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Haoran Wang; Mengyuan Li; Yuanyuan Yu; Zhenfang Chen; Yingtao DIng; Huabei Jiang; Huikai Xie

doi:10.1109/TRANSDUCERS.2019.8808528

A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Haoran Wang, Mengyuan Li, Yuanyuan Yu, Zhenfang Chen, Yingtao DIng, Huabei Jiang, Huikai Xie

集成电路与电子学院

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

14 引用（Scopus）

摘要

This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.

源语言	英语
主期刊名	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版商	Institute of Electrical and Electronics Engineers Inc.
页	857-860
页数	4
ISBN（电子版）	9781728120072
DOI	https://doi.org/10.1109/TRANSDUCERS.2019.8808528
出版状态	已出版 - 6月 2019
活动	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, 德国期限: 23 6月 2019 → 27 6月 2019

出版系列

姓名	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

会议

会议	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
国家/地区	德国
市	Berlin
时期	23/06/19 → 27/06/19

访问文件

10.1109/TRANSDUCERS.2019.8808528

其它文件与链接

链接到 Scopus 的出版物

引用此

Wang, H., Li, M., Yu, Y., Chen, Z., DIng, Y., Jiang, H., & Xie, H. (2019). A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. 在 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (页码 857-860). 文章 8808528 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808528

Wang, Haoran ; Li, Mengyuan ; Yu, Yuanyuan 等. / A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. 页码 857-860 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{d89bf2ef6d6f450cb045c664e1248fd5,

title = "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT",

abstract = "This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.",

keywords = "MEMS speaker, ceramic PZT, loud speaker, microspeaker, piezoelectric",

author = "Haoran Wang and Mengyuan Li and Yuanyuan Yu and Zhenfang Chen and Yingtao DIng and Huabei Jiang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808528",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "857--860",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

address = "United States",

}

Wang, H, Li, M, Yu, Y, Chen, Z, DIng, Y, Jiang, H & Xie, H 2019, A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. 在 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808528, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., 页码 857-860, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, 德国, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808528

A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. / Wang, Haoran; Li, Mengyuan; Yu, Yuanyuan 等.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. 页码 857-860 8808528 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

AU - Wang, Haoran

AU - Li, Mengyuan

AU - Yu, Yuanyuan

AU - Chen, Zhenfang

AU - DIng, Yingtao

AU - Jiang, Huabei

AU - Xie, Huikai

PY - 2019/6

Y1 - 2019/6

N2 - This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.

AB - This paper presents a ceramic PZT based piezoelectric MEMS speaker that can generate high sound pressure level (SPL) with small driving voltage. By using wafer bonding and chemical mechanical polishing techniques, the MEMS speaker is made of ceramic PZT that is only about 5 μm thick. With a chip size of 6.7 mm by 6.7 mm, the fabricated speaker generated a maximum SPL of 108 dB at the resonance of 8.2 kHz under just 5 V. This SPL value is comparable with those of conventional speakers or microspeaker arrays with similar size.

KW - MEMS speaker

KW - ceramic PZT

KW - loud speaker

KW - microspeaker

KW - piezoelectric

UR - http://www.scopus.com/inward/record.url?scp=85071906368&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2019.8808528

DO - 10.1109/TRANSDUCERS.2019.8808528

M3 - Conference contribution

AN - SCOPUS:85071906368

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 857

EP - 860

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Wang H, Li M, Yu Y, Chen Z, DIng Y, Jiang H 等. A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT. 在 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. 页码 857-860. 8808528. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808528

A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

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